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    烧结工艺对掺Al增强氮化铝陶瓷基板的显微结构和性能的影响

    Influence of Sintering Process on Microstructure and Properties of Al Doped Aluminum Nitride Ceramic Substrate

    • 摘要: 选用Y2O3-Al作为烧结助剂,采用流延成型法制备AlN陶瓷。研究了排胶和烧结制度对AlN陶瓷的物相组成、致密度、显微组织、热学及力学性能的影响。结果表明,真空-空气两步排胶法能够减缓排胶过程中Al的氧化,制备的AlN陶瓷第二相孤立分布在三角晶界处,热导率和弯曲强度分别比一步排胶法制备的陶瓷高2.5%和14.8%。随着烧结温度的升高,第二相由YAG转变为Y2O3/Al2O3比较高的YAP,晶格氧含量下降。经过1800℃烧结后,AlN陶瓷的热导率和弯曲强度分别达到了171.23 W·m-1·K-1和(456.77±19.34)MPa。

       

      Abstract: Y2O3-Al was chosen as the sintering additive, AlN ceramics were prepared through the tape casting method.The impacts of the debinding and sintering process on the phase composition, density, microstructure characteristics and thermal and mechanical properties of AlN ceramics were studied.The results show that the mitigation of Al oxidation during the debinding process is accomplished through a vacuum-air two-step debinding program. In the prepared AlN ceramics, the secondary phase is found to be isolated and distributed at the triangular grain boundaries. A measurable enhancement of thermal conductivity and bending strength, by 2.5% and 14.8% respectively, is seen to exceed that achieved with a one-step debinding process.When the sintering temperature is increased, a transition of the secondary phase from YAG to YAP with a higher Y2O3/Al2O3 ratio is revealed, the oxygen content in lattice decreases. After being sintered at 1800 ℃, the thermal conductivity and bending strength of the AlN ceramics are measured to be 171.23 W·m-1·K-1 and (456.77±19.34) MPa, respectively.

       

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