氧化钇陶瓷涂层的制备及结构研究
Study on Preparation and Structure of Yttrium Oxide Ceramic Coating
罗小晨, 王文东, 刘邦武, 夏 洋
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作者单位：中国科学院 微电子研究所 微电子器件与集成技术重点实验室, 北京 100029
中文关键字：等离子喷涂； 氧化钇涂层； 还原； 相变
英文关键字：plasma spraying; yttrium oxide coatings; reducibility; phase transformation
中文摘要：用等离子喷涂方法以氩气作为主要工作气体在铝基体上制备了氧化钇涂层；采用X射线衍射、扫描电镜和金相分析技术对涂层的形貌及结构进行了分析。结果表明：氧化钇涂层孔隙率约为5.6%；以氢气为辅助气体制备的涂层表面出现了杂色斑点，而用氦气作为辅助气体，可以得到纯正白色的氧化钇涂层。同时，使用Ar/H2气体的涂层中存在较明显的单斜相。而Ar/He气体条件则能在一定程度上抑制喷涂过程中的立方相向单斜相转变。
英文摘要：Y2O3 coating was prepared on aluminum substrate using plasma spraying with argon as primary gas. Structure and morphology were studied using X-ray diffraction, scanning electron microscopy and metallographic analysis. The results show that the porosity of Y2O3 coating is 5.6%. Coating prepared with helium as secondary gas is purely white. However, there are black spots when hydrogen is used as secondary gas. A phase transformation from cubic to monoclinic tends to take place during the spraying operation under argon and hydrogen atmosphere. However this prejudicial transformation can be suppressed by helium instead of hydrogen.