Al-Ag弱掺杂ZnO薄膜的结构和光学特性
Structure and Optical Characteristics of ZnO Thin Film Doped with Al-Ag
方来鹏, 谭红琳
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作者单位：(昆明理工大学 材料科学与工程学院, 云南 昆明 650093)
中文关键字：溶胶凝胶法； Al-Ag掺杂； ZnO薄膜
英文关键字：sol-gel technique; Al-Ag co-dopants; ZnO film
中文摘要：采用溶胶凝胶法制备了Al-Ag共掺杂的ZnO薄膜，研究了该ZnO薄膜的表面形貌、微结构和光学性质。结果表明，通过改变Al、Ag掺杂量与Zn的比值，ZnO薄膜呈现出良好的C轴取向。
英文摘要：ZnO film co-doping with Al-Ag was prepared by sol-gel technique. The surface morphology, mirostructure and optical property of the film were examined by SEM and X-ray diffraction. The results show that ZnO film takes on C-axis direction by changing the ratio of Al-Ag co-dopants and Zn.