Ag-Al共掺杂ZnO薄膜的结构及其光学性能的研究
Ag-Al Co-doped ZnO Thin Films and Their Optical Properties
马正洪, 谭红琳, 艾国齐
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作者单位：(昆明理工大学 材料科学与工程学院, 云南 昆明 650031)
中文关键字：溶胶-凝胶； 掺杂ZnO薄膜； 晶体结构； 透光率
英文关键字：sol-gel method; doped ZnO thin film; crystal structure; luminousness
中文摘要：采用溶胶-凝胶工艺在普通玻璃基片上制备了Ag +、A13 +共掺ZnO薄膜，通过XRD、紫外分光光度计和金相显微镜等设备，研究了掺杂Ag和Al对半导体ZnO薄膜组织结构和光学性能的影响。结果表明，掺杂Ag和Al对ZnO薄膜结构和光学性能的影响因浓度不同而有差异。Ag +、A13 +掺杂浓度为1%时，摩尔比为4 ∶ 1；固定Ag + 浓度为1.5%， A13 +浓度为0.5%；Ag +、A13 +浓度为3%，摩尔比为4 ∶ 1，提拉次数15次时，ZnO薄膜的结构、透光率最好。
英文摘要：Ag +, A13 + co-doped ZnO thin films were prepared on glass substrate by sol-gel process. The microstructure and optical properties of the film were studied by XRD, UV spectrophotometer, optical microscopy and other equipments. The results show that the microstructure and optical properties of Al doped ZnO thin film is different because of the different doping concentration. The doping concentration of Ag + and A13 + is 1%, molar ratio is 4 ∶ 1; fixed Ag + concentration is 1.5%, A13 + concentration is 0.5%; Ag +, A13 + concentration is 3%, molar ratio is 4 ∶ 1, the number of pulling is 15, the structure of ZnO thin film and light transmission rate is best.