金属陶瓷涂层复合金属介质Cr的性能研究

    Study on Properties of Cermet Coating Composite Metal Medium Cr

    • 摘要: 为使金属陶瓷硬质涂层具备高硬度的同时兼具“软”涂层的良好自润滑性能,以三元金属陶瓷涂层TiAlN为对象,研究不同含量金属介质Cr掺杂对涂层微观结构及力学性能的影响,并制备金属陶瓷复合金属相结构的涂层。采用阴极电弧加辉光放电技术,通过控制Cr靶电流在SUS304不锈钢及单Si晶片上制备TiAlN复合不同比例含量Me-Cr的涂层,借助SEM观察涂层的微观组织形貌,采用EDS表征涂层元素成分,采用XRD分析涂层物相构成。采用二维轮廓仪及三维形貌仪表征涂层的表面粗糙度及表面形貌。采用维氏硬度计测试涂层与基体的复合硬度,采用纳米划痕仪表征涂层的摩擦系数。结果表明,Me-Cr掺杂对于涂层的微观结构和力学性能均有显著影响。Me-Cr的掺杂会使得涂层表面的针孔与液滴增多,粗糙度显著降低,最低可达31.2 nm;物相方面,涂层中产生以Cr-Ti为主的合金相;硬度有一定程度的提高,最高可达1035.2 HV;摩擦系数介于0.2~0.3。

       

      Abstract: In order to make cermet hard coating have high hardness and good self-lubrication performance of "soft" coating,taking ternary cermet coating TiAlN as the object, the influence of different content of metal medium Cr doping on the microstructure and mechanical properties of the coating were studied, and the cermet composite metal phase structure coating w as prepared. The cathode arc plus glow discharge technology was used to prepare TiAlN composite Me-Cr coatings with different proportion on SUS304 stainless steel and single Si wafers by controlling Cr target current. The microstructure morphology of the coating was observed by SEM, the elemental composition of the coating was characterized by EDS, and the phase composition of the coating was analyzed by XRD. The two-dimensional profilometer and three-dimensional morphology i nstrument was used to characteristic the coating surface roughness and surface morphology of the coating. The Vickers hard ness tester was used to test the compound hardness of coating and matrix, the nano scratch instrument was used to study the friction coefficient of the coating. The results show that Me-Cr doping has a significant effect on the microstructure and mechanical properties of the coating. With the doping of Me-Cr, the pinholes and droplets on the surface of the coating increase, and the roughness of the coating decreases significantly, up to 31.2 nm. In terms of phase, Cr-Ti alloy phase is mainly produced in the coating. The hardness increases to a certain extent, up to 1035.2 HV. The friction coefficient is between 0.2 and 0.3.

       

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