挤压温度对磁控溅射钼管靶组织和性能的影响

    Effect of Extrusion Temperature on Microstructure and Properties of Molybdenum Tube Targets for Magnetron Sputtering

    • 摘要: 采用费氏粒度为2.0~3.0μm,松装密度为1.0~1.6 g/cm3的常规市售钼粉,经冷等静压和氢气烧结的方法制得钼管坯料。使用2.5MN卧式挤压机在1210、1320℃两种挤压温度进行钼管热挤压成型,对挤压后钼管的密度、硬度、力学性能和金相组织进行分析。并对两种不同挤压温度的试验结果进行对比分析。结果表明采用合适的挤压工艺可以获得优异组织与性能的钼管靶。

       

      Abstract: The molybdenum tube blanks were prepared by cold isostatic pressing and hydrogen sintering using conventional commercially available molybdenum powder with a Fisher particle size of 2.0 μm-3.0 μm and a bulk density of 1.0 g/cm3-1.6 g/cm3. The molybdenum tube was formed by hot extrusion using a 2.5 MN horizontal extruder at two extrusion temperatures of 1210 ℃ and 1320 ℃, and the density, hardness, mechanical properties and metallographic structure of the molybdenum tube after extrusion were analyzed. The experimental results of two different extrusion temperatures were compared and analyzed. The results show that the molybdenum tube target with excellent structure and properties can be obtained by using appropriate extrusion process.

       

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