Abstract: In view of the problems of low surface bearing capacity and poor wear resistance of 316L stainless steel, the planetary ball mill was used for the surface mechanical grinding treatment of 316L stainless steel（SMAT）, and the surface tissue sufters severe plastic deformation, then the SMAT-treated 316L stainless steel was re-treated by vacuum nitriding at 520 ℃-600 ℃. The effect of different technological parameters on the microstructure of the layer was investigated by X-ray diffraction（XRD） and metallographic microscopy（OM）. Vickers hardness tester was used to study the cross section hardness gradient curves of stainless steel treated by different processes. Under different processes, the wear resistance of nitriding layer was studied by reciprocating friction and wear testing machine. Furthermore, the wear morphology, wear contour and wear amount the of material were analyzed by optical 3D surface profilometer. The results show that, after SMAT +vacuum nitriding, the thickness of nitriding layer is increased and the surface hardness and wear property are improved to some extent.