Study on Friction and Wear Property of Diamond-carbide Coatings Synthesized on TiZrHf Mid-entropy Alloy by MPCVD Method

Diamond-carbide coatings were synthesized on TiZrHf mid-entropy alloy by microwave plasma chemical vapor deposition（MPCVD） method with high-purity methane（CH₄） and hydrogen（H₂） as reaction gases. The structure, phase composition, hardness and wear property of the coatings were obtained under the condition of different CH₄ concentration.The results show that the main components of the coatings after carbonization-deposition are metallic carbide and nanodiamond particles,and the surface hardness is enhanced obviously. Among them, the coatings prepared with 3% methane concentration possess the highest hardness（about 660.2 HV） and the lowest friction coefficient, and the wear-resisting property was modified significantly.